Abstract: We propose a one-millimeter-scale linear ultrasonic motor and its feedback control system with a Hall sensor. The size of the stator measures 1.6 mm in height, 1.6 mm in width, and 0.3 mm in ...
Abstract: Due to the advantages of small structure, fast response, large torque, and no magnetic interference, ultrasonic motors have been successfully applied to aerospace, automation, and medical ...